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lighttools的基本操作学习资源，lighttools是用于照明设计的软件

We propose and discuss several fabrication processes for a complex-shaped mirror, which is a fly-eye mirror, used in an extreme ultraviolet lithography (EUVL) illumination system. The mirror has a complex reflective surface consisting of many concave mirror elements that are sections of a sphere; th

A condenser for a ring-field extreme ultra-violet (EUV) projection lithography camera is presented. The condenser consists of a gently undulating mirror, that we refer to as a ripple plate, and which is illuminated by a collimated beam at grazing incidence. The light is incident along the ripples rather than across them, so that the mcident beam is reflected onto a cone and subsequently focused on to the arc of the ring field. A quasistationary illumination is achieved, since any one field point receives light from points on the ripples, which are distributed throughout the condenser pupil. The design concept can easily be applied to ifiuminate projection cameras with various ring-field and numerical aperture specifications. Ray-tracing results are presented of a condenser for a 0.25 NA EUV projection camera.

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